JPH0230766Y2 - - Google Patents

Info

Publication number

JPH0230766Y2

JPH0230766Y2 JP1691382U JP1691382U JPH0230766Y2 JP H0230766 Y2 JPH0230766 Y2 JP H0230766Y2 JP 1691382 U JP1691382 U JP 1691382U JP 1691382 U JP1691382 U JP 1691382U JP H0230766 Y2 JPH0230766 Y2 JP H0230766Y2

Authority

JP

Japan

Prior art keywords

solid electrolyte

heating

oxygen concentration

concentration meter

detection element

Prior art date

1982-02-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

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• 238000010438 heat treatment Methods 0.000 claims description 28
• 239000001301 oxygen Substances 0.000 claims description 22
• 229910052760 oxygen Inorganic materials 0.000 claims description 22
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 18
• 239000007784 solid electrolyte Substances 0.000 claims description 15
• 238000001514 detection method Methods 0.000 claims description 13
• 239000004020 conductor Substances 0.000 claims description 12
• 229910052751 metal Inorganic materials 0.000 claims description 12
• 239000002184 metal Substances 0.000 claims description 12
• 239000004065 semiconductor Substances 0.000 claims description 7
• 238000005192 partition Methods 0.000 claims description 3
• 239000000919 ceramic Substances 0.000 description 8
• 239000000463 material Substances 0.000 description 8
• 239000007789 gas Substances 0.000 description 6
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
• -1 oxygen ion Chemical class 0.000 description 4
• LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
• ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
• 239000012212 insulator Substances 0.000 description 2
• 229910052750 molybdenum Inorganic materials 0.000 description 2
• 239000011733 molybdenum Substances 0.000 description 2
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
• 229910052721 tungsten Inorganic materials 0.000 description 2
• 239000010937 tungsten Substances 0.000 description 2
• ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
• 229910000914 Mn alloy Inorganic materials 0.000 description 1
• PCEXQRKSUSSDFT-UHFFFAOYSA-N [Mn].[Mo] Chemical compound [Mn].[Mo] PCEXQRKSUSSDFT-UHFFFAOYSA-N 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 235000012255 calcium oxide Nutrition 0.000 description 1
• 239000000292 calcium oxide Substances 0.000 description 1
• NFYLSJDPENHSBT-UHFFFAOYSA-N chromium(3+);lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Cr+3].[La+3] NFYLSJDPENHSBT-UHFFFAOYSA-N 0.000 description 1
• 239000002131 composite material Substances 0.000 description 1
• 229910052878 cordierite Inorganic materials 0.000 description 1
• JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 1
• KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
• 239000011810 insulating material Substances 0.000 description 1
• 229910000953 kanthal Inorganic materials 0.000 description 1
• 229910052863 mullite Inorganic materials 0.000 description 1
• 229910000623 nickel–chromium alloy Inorganic materials 0.000 description 1
• RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
• 230000000704 physical effect Effects 0.000 description 1
• 229910052697 platinum Inorganic materials 0.000 description 1
• HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
• 229910010271 silicon carbide Inorganic materials 0.000 description 1
• 238000003466 welding Methods 0.000 description 1
• 229910001928 zirconium oxide Inorganic materials 0.000 description 1